Real-time, in-situ saw filter delay adjustment
US5111168A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 15, 1990 |
| Grant date | May 5, 1992 |
| Priority date | — |
| Expiry date | Aug 15, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method of adjusting the center frequency of a SAW device by providing a substrate capable of propagating a surface acoustic wave thereon having input transducer electrode on one end portion thereof, output transducer electrodes on the opposite end portion thereof and a waveguide portion therebetween, applying an RF input signal to the input transducer and providing an indication of the output obtained from the output transducer and etching the entire device with an etchant until the indication has reached a predetermined status. According to a second embodiment, the delay of a SAW device is adjusted by providing a substrate capable of propagating a surface acoustic wave thereon having an input transducer portion on one end portion thereof, an output transducer portion on the opposite end portion thereof and a waveguide portion therebetween, masking the input and output transducer portions and providing an exposed area over the waveguide portion, applying an RF input signal to the input transducer and providing an indication of the output obtained from the output transducer and etching the pattern in the unmasked poriton of the waveguide with an etchant until the indication has re…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.