Laser gas purifying apparatus

US5111473A · kind A · utility

Assignee

• Lambda Physik Forschungs - und Entwicklungsgesellschaft - GmbH · DE

Inventors

• Ulrich Rebhan · Göttingen, DE
• Gerd Steinfuhrer · Bovenden, DE
• Frank Voss · Berlin, DE
• Peter Oesterlin · Oebisfelde, DE

Key dates

• Filing date: Jan 22, 1991
• Grant date: May 5, 1992
• Expiry date: Jan 22, 2011

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/036
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In an apparatus for purifying laser gas, comprising a cooling circuit for cleaning of the laser gas, the cooling circuit is separable from the laser and operable by way of a shunt line, independently of the laser.