Two-stage cryopump

US5111667A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Hans-Ulrich Hafner · Neunburg vorm Wald, DE
• Hans-Hermann Klein · Hürth, DE
• Uwe Timm · Birkenfeld, DE

Key dates

• Filing date: Mar 4, 1991
• Grant date: May 12, 1992
• Expiry date: Mar 4, 2011

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S417/901
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

A two-stage cryopump having a refrigerator including a first stage and a second stage being colder than the first stage; a condensation member having a condensation surface; a first coupler for connecting the condensation member to the second stage in a thermally conducting manner; an adsorption member having an adsorption surface and being spaced from the condensation member; and a second coupler for connecting the adsorption member to the second stage in a heat conducting manner. There is further provided a heater for heating the adsorption member during time periods for regenerating the adsorption member. The second coupler is so designed that it thermally sufficiently insulates the adsorption member from the second stage and from the condensation member at least during heating periods of the adsorption member, for preventing heating the condensation member by the heater.