Patent · US Expired

Wafer carrier

US5111936A · kind A · utility

49Cited by
55References
13Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 30, 1990
Grant dateMay 12, 1992
Priority date
Expiry dateNov 30, 2010

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S206/833
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A moldable plastic carrier for predictably and steadfastly locating the carrier and wafers therein upon wafer transfer equipment has an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetween for spacing and supporting the axially aligned wafers in the carrier. The carrier has a pair of opposed upright end walls with one upright end wall being indexable upon the transfer equipment. The one end wall has opposing transfer equipment to contact rails each with upper and lower portions. An arch is formed between the upper and lower portions thereby forming a 4-point contact with the transfer equipment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.