Wafer carrier
US5111936A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 30, 1990 |
| Grant date | May 12, 1992 |
| Priority date | — |
| Expiry date | Nov 30, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S206/833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A moldable plastic carrier for predictably and steadfastly locating the carrier and wafers therein upon wafer transfer equipment has an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetween for spacing and supporting the axially aligned wafers in the carrier. The carrier has a pair of opposed upright end walls with one upright end wall being indexable upon the transfer equipment. The one end wall has opposing transfer equipment to contact rails each with upper and lower portions. An arch is formed between the upper and lower portions thereby forming a 4-point contact with the transfer equipment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.