Patent · US Expired

Blowing door for ultra-clean confinement container

US5112277A · kind A · utility

15Cited by

3References

8Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Didier Cruz · Grenoble, FR
Jacques Daval · Meylan, FR

Key dates

Filing date	Feb 28, 1991
Grant date	May 12, 1992
Priority date	—
Expiry date	Feb 28, 2011

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/139
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The blowing door permits the passage of an object (6) from the interior of a first container (5) to a second container (4) without the respective atmospheres of the interior of these two containers being polluted. The blowing door (2) comprises a pressurized fluid inlet (17), an inner chamber (15) and at least one of its faces is ventilated by means of filter (14) placed between the face (11) and the inner chamber (15). During the opening of the door (2), the face (11) in contact with the external atmosphere is then ventilated, so that polluting particles are not brought into the containers (4, 5) during the closure of the door (2). Application to the treatment of silicon wafers or chips to be used in microelectronics.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.