Process for producing diamond-like films and apparatus therefor
US5112458A · kind A · utility
5Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 1989 |
| Grant date | May 12, 1992 |
| Priority date | — |
| Expiry date | Dec 27, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0815
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a process for producing a diamond-like film which comprises introducing a hydrocarbon feed gas or a feed gas capable of producing a hydrocarbon on decomposition or reaction into a vacuum, ionizing the gas, and depositing the same on a substrate to form a diamond-like film thereon, the hydrocarbon gas is passed through a plasma exciter prior to the introduction into the vacuum. An apparatus for practicing the process comprises a plasma exciter means located on a passage through which the hydrocarbon gas is introduced into the vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.