Cathode sputtering apparatus
US5112467A · kind A · utility
11Cited by
6References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 15, 1991 |
| Grant date | May 12, 1992 |
| Priority date | — |
| Expiry date | Feb 15, 2011 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/3407
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A cathode sputtering apparatus provided with a quick disconnect mechanism for rapid replacement of a target. The quick disconnect mechanism preferably includes a rotatable sleeve that upon appropriate rotation exerts a clamping force on the target. The clamping force preferably is created by balls caused to cam radially outward from a central axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.