Apparatus for the inward and outward transfer of a workpiece in a vacuum chamber

US5112469A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Stefan Kempf · Alzenau, DE
• Jaroslav Zejda · Rodenbach, DE

Key dates

• Filing date: Aug 27, 1990
• Grant date: May 12, 1992
• Expiry date: Aug 27, 2010

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/566
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

An apparatus for the inward and outward transfer of a workpiece, particularly of a disk-shaped substrate in a vacuum chamber having a coating system comprising a cathode station. A conveyor means designed as a rotary table is situated inside the vacuum chamber. The rotary table accepts substrate holders which are designed as turned parts. A supporting plate is provided in the region of the inward transfer station. It supports the substrate holder and prevents a sagging thereof. The supporting plate also presses the substrate holder against the inside wall of the vacuum chamber; i.e. against a seal situated in the inside wall. As a result thereof, an air-tight separation of the inward transfer chamber from the vacuum chamber and from the atmosphere is achieved. A considerable reduction in the moved masses of the rotating component parts is achieved by a skillful designing and arrangement of the component parts. A reduction in the mass moments of inertia associated therewith results since the process cycles of the coating system can sequence more quickly.