Apparatus for performing in-feed of working member to working station
US5114302A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 22, 1988 |
| Grant date | May 19, 1992 |
| Priority date | — |
| Expiry date | Nov 22, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53261
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for performing an exact in-feed in the X and/or Y direction in the plane of a bond head, e.g. a gripper, to a working station containing a sliding plate, a support element, a first and second drives for performing the in-feeds, a guide mechanism provided with a slide part and a guide part and an integrated measuring device for determining movements of the support element oriented in the X and/or Y direction. The support element is mounted in the horizontal plane with translational and rotational degrees of freedom by a vacuum-pressurizable air bearing on the sliding plate and vertically by a vacuum-pressurizable air bearing on the slide part, the latter additionally being mounted with a vacuum-pressurizable air bearing on the sliding plate and with a counterpressure air bearing between two webs of the guide part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.