Ultra-high efficiency porous metal filter
US5114447A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 12, 1991 |
| Grant date | May 19, 1992 |
| Priority date | — |
| Expiry date | Mar 12, 2011 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB22F3/1103
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An ultra-high efficiency particulate air filter for use in the microelectronics manufacturing industry is formed as a fully homogeneous sintered metal filter that exhibits an efficiency substantially in excess of a 6 log reduction and preferably equal to or exceeding a 9 log reduction (an efficiency of 99.9999999%). The filter can be used as a process gas in-line filter in state of the art gas supply systems. The porous metal filter exhibits long term stability relative to mechanical or thermal stress and operates within the desired ultra-high efficiency levels even under high pressure conditions. It does not exhibit an outgassing problem and there is no particle shedding. These features are provided within a unit no larger than those conventionally employed heretofore with organic membranes and under substantially identical operating conditions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.