Electrostatic silicon accelerometer
US5115291A · kind A · utility
47Cited by
20References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 12, 1991 |
| Grant date | May 19, 1992 |
| Priority date | — |
| Expiry date | Jul 12, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A solid state accelerometer having an all silicon sensor for measuring accelerational and gravitational forces. The accelerometer measuring system also has associated electronics that include an analog rebalance loop and a digitizer loop.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.