Examination of physical properties of thin films

US5116121A · kind A · utility

Assignee

• BASF SE

Inventors

• Wolfgang Knoll · Mainz, DE
• Harald Knobloch · Albig, DE

Key dates

• Filing date: Jan 28, 1991
• Grant date: May 26, 1992
• Expiry date: Jan 28, 2011

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/8422
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The physical properties of thin films can be examined with polarized light using a method which comprises directing polarized light at a layer system, exciting plasmon surface polaritons therein and thereby creating Raman-scattered light within the layer or layer system under examination, and imaging said light on a detector using an imaging system.