Method of cleaning a substrate using a dichloropentafluoropropane
US5116426A · kind A · utility
43Cited by
8References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 25, 1990 |
| Grant date | May 26, 1992 |
| Priority date | — |
| Expiry date | Oct 25, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D7/28
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method for cleaning a surface of a substrate which comprises treating the surface with a dichloro-pentafluoro-propane solvent. The method is specifically directed to the use of 1,1-dichloro-2,2,3,3,3-pentafluoro propane and 1,3-dichloro-1,1,2,2,3-pentafluoropropane as the cleaning solvent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.