Zinc diffusion process
US5116781A · kind A · utility
6Cited by
3References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 1990 |
| Grant date | May 26, 1992 |
| Priority date | — |
| Expiry date | Aug 17, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/099
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process is disclosed of diffusing a zinc dopant into a III-V compound substrate. To avoid degrading the substrate surface the zinc dopant source is provided by coating an organic composition comprised of a zinc organic compound chosen from the group consisting of zinc alcoholates, .beta.-diketonate chelates and carboxylate salts. The composition inludes at least one organic film-forming moiety containing from 5 to 30 carbon atoms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.