Method and apparatus for processing a fine pattern
US5116782A · kind A · utility
14Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 22, 1989 |
| Grant date | May 26, 1992 |
| Priority date | — |
| Expiry date | Dec 22, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/875
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method and apparatus for processing a fine pattern of a sample of one of an electronic device, molecular device and bioelement device, wherein a needle having a sharpened tip is disposed in opposed relation to the sample with a gap therebetween. A voltage is applied between the needle and the sample so as to enable a tunnel current and/or a field emission current to flow therebetween and the fine pattern is provided to correct the fine pattern by effecting at least one of removal, repositioning, annealing and film formation of at least one of individual atoms and individual molecules.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.