Having a protective film of a polymer having a fluorine-containing aliphatic cyclic structure
US5117272A · kind A · utility
42Cited by
3References
23Claims
0Family size
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Inventors
Key dates
| Filing date | Apr 16, 1990 |
| Grant date | May 26, 1992 |
| Priority date | — |
| Expiry date | Apr 16, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/12044
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor integrated circuit device having a protective film made of a polymer having a fluorine-containing aliphatic cyclic structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.