Static control overlayers on opto-electronic devices
US5118924A · kind A · utility
62Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 1990 |
| Grant date | Jun 2, 1992 |
| Priority date | — |
| Expiry date | Oct 1, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/413
Abstract
In the method of this invention, lens arrays for light sensitive devices are made which have lenses that are substantially transparent over the wavelength range from 400 nm to 1000 nm comprising the steps of: PA1 a) providing a spacer and planarization layer on the device over each sensing element; PA1 b) applying a layer of photoresist material; PA1 c) patterning and flowing the photoresist material to form a desired lens array on the spacer and planarization layer by applying heat; and PA1 d) conformally coating the so formed lenses with a layer of a transparent conductor material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.