Process for preparing oxide superconducting films by radio-frequency generated aerosol-plasma deposition in atmosphere
US5120703A · kind A · utility
35Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 1990 |
| Grant date | Jun 9, 1992 |
| Priority date | — |
| Expiry date | Apr 17, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/737
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for coating a superconductive film onto a substrate is provided. In the first step of this process, a solution of the reagents required to produce the superconductive material is subjected to ultrasonic sound waves to create an aerosol. Thereafter, the aerosol contacted with plasma while being subjected to substantially atmospheric pressure and a radio frequency alternating current in excess of 100 kilohertz; a vapor is produced in this step. The vapor so produced is passed through an orifice and allowed to deposit onto a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.