Semiconductor accelerometer
US5121633A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 1988 |
| Grant date | Jun 16, 1992 |
| Priority date | — |
| Expiry date | Dec 16, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor accelerometer including a weight, a support frame surrounding the weight with a gap therebetween, at least one beam for connecting the weight to the support frame, a piezoresistor attached onto the beam for detecting acceleration, and stoppers for restricting the movement of the weight relative to the support frame, in which at least one first projection integrally mounted to the weight and at least one second projection integrally mounted to the support frame cooperate to function as the stoppers. At least one first cross member and at least one second cross member may cooperate with the first and second projections. First and second stopping members may also cooperate with the first and second projections.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.