Positioning table
US5123174A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 19, 1990 |
| Grant date | Jun 23, 1992 |
| Priority date | — |
| Expiry date | Dec 19, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S248/913
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A positioning table for locating a workpiece (17) at a predetermined position in a thin film forming apparatus. A base plate (2) movable in X-direction is supported below a workpiece placing table (12) for placing the workpiece thereon. A reference member supporting member (4) mounted on the base plate is respectively movable both in Y-direction and .theta.-direction about a predetermined shaft. First, second, and third reference members (5a, 5b, 5c) capable of contacting the workpiece by an urging device are supported by the reference member supporting member. When each reference member is moved in the X-direction or the Y-direction so as to locate the workpiece at the predetermined position, the three reference members move together with the reference member supporting member (4) in each direction. When the workpiece is moved in the .theta.-direction, the three reference members reliably rotate about the predetermined shaft and the rotational center of the workpiece is fixed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.