Integrated optical arrangement having at least one optical waveguide integrated on a substrate of a semiconductor material and the method of manufacture

US5125065A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Lothar Stoll · Hersbruck, DE
• Ulrich Wolff · Munich, DE
• Gustav Mueller · Munich, DE

Key dates

• Filing date: Aug 27, 1990
• Grant date: Jun 23, 1992
• Expiry date: Aug 27, 2010

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F1/0151
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An integrated optical arrangement having at least one optical waveguide integrated a substrate of semiconductor material, characterized by the waveguide being a rib waveguide comprising the p-doped material disposed on a substrate which contains a waveguiding layer which is either an n-doped or an undoped material, said arrangement having either a pn or a pin junction between the p-doped material of the rib and the n-doped or undoped material of the waveguiding layer. In addition, a method for forming the various layer is disclosed.