Electrostatic dust collector for use in vacuum system
US5125124A · kind A · utility
10Cited by
3References
5Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 26, 1990 |
| Grant date | Jun 30, 1992 |
| Priority date | — |
| Expiry date | Jun 26, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/564
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electrostatic dust collector including a wall enclosing a vacuum chamber in which a target face to be subjected to dust removal is provided, a radiation emitting device for emitting radiation to dust on the target face so as to charge the dust positively or negatively, a dielectric member which is provided in the vacuum chamber and has a collecting face confronting the target face and a member for imparting negative or positive potential to the collecting face such that the dust charged oppositely is attracted to the collecting face.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.