Substrate heater utilizing protective heat sinking means
US5126533A · kind A · utility
14Cited by
11References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 1990 |
| Grant date | Jun 30, 1992 |
| Priority date | — |
| Expiry date | Mar 19, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N60/0296
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate heater for the production of superconducting films utilizing a nickel alloy block uniformly heated with a resistance heating element fully immersed in a brazing material that fills a recess in the block. Massive electric power connectors surround the heating element leads outside the braze material so as to provide a protective heat sink therefor and also to mechanically strengthen the block against warpage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.