Optical probing method and apparatus
US5126660A · kind A · utility
8Cited by
5References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 2, 1991 |
| Grant date | Jun 30, 1992 |
| Priority date | — |
| Expiry date | Jan 2, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated circuit device (11) is tested by directing a laser beam (19) onto an electrochromic member (17) in close proximity to a conductor (13) of the integrated circuit. Reflected laser light is directed to a detector (21) which converts it to an electrical signal for display by a lock-in amplifier (25). The display characterizes the voltage on the conductor (17) and thereby permits diagnosis of the operation of the integrated circuit (11).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.