Laser interferometer for inspecting the surface of a specimen
US5127734A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 1991 |
| Grant date | Jul 7, 1992 |
| Priority date | — |
| Expiry date | Jan 17, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A laser interferometer for inspecting the surface condition of a specimen by irradiating the specimen on a specimen support mechanism with a laser beam projected thereto through a reference plate, and observing the interference fringe produced by interference between reflected light from a reference surface of the reference plate and a surface of the specimen under inspection, the laser interferometer includes: an interferometer housing accommodating therein an optical laser beam guide member and an optical interference fringe imaging member, and is provided with a laser beam guide portion in a wall portion thereof; a laser tube mount member of a cylindrical form projected on the outer side of the housing and positioned in such a manner so as to circumvent the laser guide portion; and a laser tube detachably fitted in the laser tube mount member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.