Device for optically measuring a pressure differential
US5128537A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 15, 1991 |
| Grant date | Jul 7, 1992 |
| Priority date | — |
| Expiry date | May 15, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0079
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for optically measuring a pressure difference in a medium by means of a Fabry-Perot interferometer, comprises a transparent plate and a diaphragm block connected to the transparent plate, the diaphragm block comprising a substrate, a measuring diaphragm formed along the inner surface of the substrate, and a spacer separating the inner surface of the transparent plate and the inner surface of the substrate. A first planar mirror is disposed on the inner surface of the plate and a second planar mirror is disposed on the inner surface of the measuring diaphragm so that they constitute the Fabry-Perot interferometer. The measuring diaphragm is shiftable by a distance (H) in response to a pressure difference (.delta.p) exerted on inner and outer surfaces of the measuring diaphragm whereby the optical length (L) of the Fabry-Perot interferometer changes as a function of the pressure difference (.delta.p). The substrate includes a depression on one side only so that the material remaining under the depression is of a predetermined thickness and comprises the measuring diaphragm. Since the measuring diaphragm constitutes a portion of the substrate and is a continuation of the crys…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.