Two-dimensional scanning device for detecting position between two relatively movable objects
US5130554A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 22, 1991 |
| Grant date | Jul 14, 1992 |
| Priority date | — |
| Expiry date | Oct 22, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/681
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a position detecting apparatus for detecting a relative position of two objects which are relatively moved. The apparatus includes a probe, a probe driving device, a position detecting device and an object driving device. The probe is provided for the first of the two objects so as to face the surface of the second of the two objects, so as to read information from the surface of the second object. The probe driving device allows the probe to two-dimensionally scan the surface of the second object so that the probe reads the two-dimensional information from the surface of the second object. The position detecting device detects a relative positional relation of the two objects by comparing the two-dimensional information obtained by the two-dimensional scan of the probe by the probe driving device with reference to two-dimensional information. The object driving device executes the relative positioning of the two objects on the basis of the result of the detection of the position detecting device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.