Patent · US Expired

Multi-stage vacuum pump with reaction chamber between stages

US5131825A · kind A · utility

7Cited by

6References

11Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Paul Bachmann · Cologne, DE
Lothar Brenner · Bad Münstereifel, DE
Hartmut Kriehn · Neunburg vorm Wald, DE
Monika Kuhn · Cologne, DE

Key dates

Filing date	Feb 22, 1991
Grant date	Jul 21, 1992
Priority date	—
Expiry date	Feb 22, 2011

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF04C2210/62
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

The invention relates to a method for the operation of a multi-stage, dry compression vacuum pump (1) with an inlet (7) and an outlet (9), in which the aspirated gases contain gaseous components which endanger the operation of the vacuum pump; in order to render the gas components harmless it is proposed that the gases aspirated from the vacuum chamber (8) and flowing through the vacuum pump be carried through a reaction chamber (14) in which the components endangering the vacuum pump are chemically or physically treated at a pressure between the aspiration pressure and the outlet pressure of the vacuum pump.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.