Method of fabricating imaging apparatus
US5132195A · kind A · utility
12Cited by
7References
41Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 30, 1991 |
| Grant date | Jul 21, 1992 |
| Priority date | — |
| Expiry date | Aug 30, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/12
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a method for fabricating imaging apparatus, adjoining regions, each forming only part of the active area of the complete device, are laid down separately, enabling larger active areas to be produced than would otherwise be possible using conventional wafer stepper equipment. In the complete device, imaging may be arranged over the boundary between the regions and/or charge may be transferred across the boundary.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.