Pressure transmitter assembly having sensor isolation mounting
US5133215A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 19, 1991 |
| Grant date | Jul 28, 1992 |
| Priority date | — |
| Expiry date | Jun 19, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0038
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The apparatus for sensing pressure comprises a header, having at least one input port for receiving a substance under pressure. A substrate, having a wafer-like shape with a relatively large surface area in comparision to its thickness, includes at least one internal passage to couple the substance under pressure. A pressure sensing element is mounted onto the surface of the substrate over an exit port of the internal passage coupling the substance under pressure. The substrate is bonded to a surface of the header at extreme locations from a location in which the pressure sensing element is mounted. Thus isolation is provided for the pressure sensing element from unwanted stresses induced in the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.