Low temperature preparation of ultrafine oxide particles using organized reaction media
US5133955A · kind A · utility
8Cited by
6References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 22, 1988 |
| Grant date | Jul 28, 1992 |
| Priority date | — |
| Expiry date | Dec 22, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/64
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present invention relates to a method for the preparation of ultrafine oxide particles using organized reaction media. Integrated circuit (IC) densities have necessitated the use of ultrahigh purity process fluids in state of the art fabrication facilities. It is the purpose of the present invention to synthesize monodispersed submicron particles of some representative contaminants, such as ultrafine oxide particles, using organized reaction media, and study their characteristics in relation to their removal from process fluids.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.