Apparatus and method for controlling gradients in radio frequency heating
US5134261A · kind A · utility
17Cited by
8References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 1990 |
| Grant date | Jul 28, 1992 |
| Priority date | — |
| Expiry date | Mar 30, 2010 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1092
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A composite susceptor for a radio frequency (RF) heated crystal growing furnace has a plurality of stacked electrically insulating and electrically conducting elements about the crucible area so that a proper temperature gradient is established and controlled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.