Plasma X-ray tube, in particular for X-ray preionizing of gas lasers, and an electron gun using the plasma X-ray tube
US5134641A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 9, 1990 |
| Grant date | Jul 28, 1992 |
| Priority date | — |
| Expiry date | Oct 9, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/09716
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma X-ray tube, which can be referred to as a one-chamber ionizing tube for pre-ionizing TE lasers, in particular excimer lasers, includes an extended, box-like housing with a U-shaped hollow cathode which is disposed in the interior of the housing and is also elongated. The open side of the hollow electrode faces an X-ray target which is in the form of a gas-tight foil. Between the X-ray target and the hollow cathode is a long wire-shaped igniting electrode. When a positive voltage or a voltage pulse is applied to the igniting electrode, an electrical field is formed around it. Electrons that are present are forced onto a long, spiral path and gas atoms are ionized under the influence of the electrical field and because of ambient radiation. Electron avalanches form and lead to initiation of a wire discharge. When the accelerator voltage, which is typically at most between 60 kV and 120 kV, is applied to the hollow cathode low-pressure plasma, ions are extracted and accelerated against the hollow cathode. When the ions impact, secondary electrons are emitted from the hollow cathode and are accelerated in the opposite direction, so that an electron beam forms and strikes the X…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.