Capacitively coupled radiofrequency plasma source

US5136211A · kind A · utility

Assignee

• Kaufman & Robinson, Inc. · US

Inventors

• Harold R. Kaufman · Fort Collins, US
• Raymond S. Robinson · Fort Collins, US

Key dates

• Filing date: Jan 28, 1992
• Grant date: Aug 4, 1992
• Expiry date: Jan 28, 2012

Classification

• Technology area (CPC —): General

Abstract

A pair of dissimilarly-sized electrodes are driven by a radiofrequency source to create a plasma. A magnetic field is oriented to be parallel to a surface area on the smaller electrode. The field strength increases to either side of that smaller electrode. As shown, ions are electrostatically accelerated out of the plasma, but they instead may be accelerated magnetically, electrons may in the alternative be extracted or there may be no accelerating mechanism.