Optical detection of a surface motion of an object using a stabilized interferometric cavity
US5137361A · kind A · utility
26Cited by
8References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1991 |
| Grant date | Aug 11, 1992 |
| Priority date | — |
| Expiry date | Mar 25, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical detection of a surface motion of an object is disclosed. An optical interferometer receives a laser light which is scattered from the surface of the object and transmitted through a substantial length of an optical fiber. The stabilization is carried out by a signal which is obtained by processing signals generated by a reference detector and a stabilization detector located respectively at the input side and the output side of the interferometer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.