Electrically conductive resist material, a process for its preparation and its use

US5137799A · kind A · utility

Assignee

• Hoechst GmbH · DE

Inventors

• Guenther Kaempf · Oestrich-Winkel, DE
• Michael Feldhues · Bad Soden am Taunus, DE
• Ude Scheunemann · Bad Soden am Taunus, DE
• Juergen Lingnau · Mainz, DE

Key dates

• Filing date: Feb 2, 1990
• Grant date: Aug 11, 1992
• Expiry date: Feb 2, 2010

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/032
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An electrically conductive resist material is disclosed, comprising at least one polymer which is sensitive to ionizing radiation and a soluble electrically conductive oligomer or polymer. A process for producing the resist material is also described, comprising admixing an electrically conductive oligomer or polymer dissolved in a solvent to at least one polymer which is sensitive to ionizing radiation. The resist material is useful in preparing electron beam resists which prevent electrostatic charging and resultant electrostatic fields.