Patent · US Expired

Power supply device for thermionic emitting cathode

US5138232A · kind A · utility

4Cited by

2References

15Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Reiner Schleiff · Hanau, DE
Tomas Baumecker · Bruchköbel, DE
Vladimir Ibl · Bad Homburg vor der Höhe, DE

Key dates

Filing date	Jun 18, 1991
Grant date	Aug 11, 1992
Priority date	—
Expiry date	Jun 18, 2011

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3132
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention described here is concerning a power supply device of a thermionic emitting cathode, an electron source in an electron vapor deposition plant. This device is provided with a transmitter whose secondary feeds the thermionic emitting cathode and whose primary is supplied with pulse width modulated and controlled heater current (I.sub.HC). The control of this heater current (I.sub.HC) is provided directly by introducing the heater current nominal value (I.sub.HC nominal) from the outside or in a manner that the current emitted (I.sub.EC) from the thermionic emitting cathode is monitored and fed galvanically decoupled to the controller. Here the galvanic decoupled connection is achieved by a pulse width modulated, optical signal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.