Patent · US Expired

Non-volatile storage cell

US5138573A · kind A · utility

18Cited by
3References
8Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 7, 1988
Grant dateAug 11, 1992
Priority date
Expiry dateJun 7, 2008

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/518
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A non-volatile storage cell has (a) storage points which are insulated from one another and each having a stack of gates formed, in order, by a first insulant in contact with the substrate, a floating gate, a second insulant and a control gate, a source and a drain formed in substrate on either side of the stack and a channel, whose length is oriented in a direction (x) and (b) conductor lines serving to apply electric signals to the stacks of gates and the drains, the second insulant having, in a plane perpendicular to the surface of the substrate and containing the first direction (x), the shape of an inverted U within which is located the entire floating gate, the control gate also being shaped like an inverted U, without projection and within which is located the entire second insulant.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.