Alkaline stripping compositions
US5139607A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 1991 |
| Grant date | Aug 18, 1992 |
| Priority date | — |
| Expiry date | Apr 23, 2011 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC09D9/00
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An alkaline positive and negative resist stripping composition having low volatility and operable at temperatures less than about 90.degree. C. which comprises, PA0 A. about 10 to 30% by weight of tetrahydrofurfuryl alcohol; PA0 B. about 5 to 30% by weight of a polyhydric alcohol; PA0 C. about 10 to 30% by weight of the reaction product of one mole of furfuryl alcohol with about 1 to 20 moles of an alkylene oxide, PA0 D. about 1 to 30% by weight of a water soluble Bronstead base type of hydroxide compound, and PA0 E. the remainder being water. The composition comprising a ratio of organic materials to inorganic materials to about 0.25:1 to 3:1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.