Fluidized bed for production of polycrystalline silicon
US5139762A · kind A · utility
32Cited by
19References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 11, 1990 |
| Grant date | Aug 18, 1992 |
| Priority date | — |
| Expiry date | Jul 11, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B33/03
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An improved fluidized bed reactor and a method for utilizing the fluidized bed reactor in the production of, for example, high purity polycrystalline silicon, by the pyrolysis of silane containing gas. The reactor being characterized by an entrainment zone located above a lower reaction zone. The entrainment zone having a cross-sectional area less than or equal to the cross-sectional area of the reaction zone and being capable of maintaining a fluidization gas velocity sufficient to entrain silicon powder particles, yet not sufficient to entrain silicon particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.