Apparatus for polishing hard disk substrates
US5140774A · kind A · utility
30Cited by
6References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 31, 1991 |
| Grant date | Aug 25, 1992 |
| Priority date | — |
| Expiry date | Oct 31, 2011 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B27/0069
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus capable of simultaneously polishing a plurality of hard disk substrates at the same time includes at least three substrate carriers which are rotatably disposed on an index table and which carry and transfer a plurality of hard disk substrates, are moved successively through a substrate loading station, a substrate polishing station and a substrate removing station in response to intermittent rotation of the index table.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.