Patent · US Expired

Examination of the physical properties of thin films

US5141311A · kind A · utility

6Cited by

2References

5Claims

0Family size

Assignee

BASF SE

Inventors

Werner Hickel · Ludwigshafen, DE
Wolfgang Knoll · Mainz, DE

Key dates

Filing date	May 2, 1990
Grant date	Aug 25, 1992
Priority date	—
Expiry date	May 2, 2010

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/21
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The physical properties of thin films can be examined with the aid of polarized light with which the film to be examined is irradiated while the reflected or transmitted light is deflected in the direction of an imaging system, the polarized light having the effect of exciting waveguide modes in the film to be examined.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.