Patent · US Expired

Image processing device for an electron microscope

US5142147A · kind A · utility

10Cited by
2References
4Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 10, 1990
Grant dateAug 25, 1992
Priority date
Expiry dateDec 10, 2010

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/221
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

The present invention discloses an image processing device for an electron microscope intending to improve the image quality by subjecting image data D.sub.t to interframe integration, comprising means for detecting at least either one of variations of said image data D.sub.t in 1 frame unit and modifications in the observation condition of the electron microscope; a frame memory storing image data .intg.D.sub.t after the integration subjected to the interframe integration; integrating means for executing the interframe integration with a degree of integration corresponding to at least either one of the variations and the modifications between the image data D.sub.t and the image data .intg.D.sub.t after the integration and storing the image data after the integration in the frame memory as new image data .intg.D.sub.t after the integration; and means for displaying the image data .intg.D.sub.t after the integration as an observed image. By using the construction described above it is possible to provide an image processing device for an electron microscope, which can make the property of following variations and the effect of improving the image quality compatible, because the deg…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.