MIM element with a doped hard carbon film
US5142390A · kind A · utility
51Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 22, 1990 |
| Grant date | Aug 25, 1992 |
| Priority date | — |
| Expiry date | Feb 22, 2010 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1365
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed herein is an MIM device having a hard carbon film as the insulator. The hard carbon film contains at least one of the following elements: a group III element, a group IV element, a group V element, an alkali metal element, an alkaline earth metal element, nitrogen, oxygen, a chalcogen element or a halogen element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.