Electron microscope
US5144129A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 20, 1990 |
| Grant date | Sep 1, 1992 |
| Priority date | — |
| Expiry date | Dec 20, 2010 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope comprising an electron gun for generating an electron beam, an irradiation lens system for irradiating a specimen with the electron beam, means for obtaining an image signal of the specimen, a frame memory for storing the image signal, means for obtaining a total accumulation function, which indicates the sum total of accumulated values in a plurality of one-dimensional directions, and in which each of the accumulated values in the plurality of one-dimensional directions indicates accumulation with respect to a frequency of a function obtained by applying one-dimensional Fourier transform to a function obtained by projecting two-dimensional intensity distribution of said image signal in corresponding one-dimensional direction thereof, and means for obtaining a substantial extreme point of the total accumulation function.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.