Patent · US Expired

Device for the generation of a plasma

US5146137A · kind A · utility

77Cited by

5References

17Claims

0Family size

Assignee

Leybold GmBH · DE

Inventors

Roland Gesche · Seligenstadt, DE
Karl-Heinz Kretschmer · Hamburg, DE

Key dates

Filing date	Mar 29, 1990
Grant date	Sep 8, 1992
Priority date	—
Expiry date	Mar 29, 2010

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/32165
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention relates to a device for the generation of a plasma by means of circularly polarized high frequency waves. These high frequency waves are generated by means of voltages having a phase rotation of 90.degree..

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.