Acoustic transducer
US5146435A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 4, 1989 |
| Grant date | Sep 8, 1992 |
| Priority date | — |
| Expiry date | Dec 4, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/435
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An acoustic transducer includes a perforated capacitor plate; a movable capacitor plate spaced from the perforated plate; springs for movably supporting the movable capacitor plate relative to the perforated plate; and a support structure for supporting the perforated and movable plates, where the movable plate is interconnected to the support structure by the springs and where the plates, springs and support structure form a unified, monolithic structure. The movable plate, springs and support structure are made from a silicon wafer. The transducer also includes a dielectric fluid in the space between the plates; and equipment for applying an electric field across the plates for producing an output signal representative of the variation in capacitance induced by the variation in space between the plates in response to an acoustic signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.