Magnetic recording media manufactured by a process in which a negative bias voltage is applied to the substrate during sputtering
US5147734A · kind A · utility
8Cited by
4References
10Claims
0Family size
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Key dates
| Filing date | Mar 14, 1989 |
| Grant date | Sep 15, 1992 |
| Priority date | — |
| Expiry date | Mar 14, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12861
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A magnetic recording member with improved coercive force is obtained by: PA1 (a) forming by sputtering or Cr film on a non-magnetic substrate; PA1 (b) forming by sputtering an epitaxially grown film of a Co alloy containing at least Cr as an additional metal on the Cr film formed in the step (a); and applying a negative bias voltage to the substrate during at least one of steps (a) and (b). The coercive force of the magnetic recording member is further increased when high-frequency sputtering is used instead of direct current sputtering.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.