Scanning probe microscopy
US5148026A · kind A · utility
8Cited by
4References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 19, 1991 |
| Grant date | Sep 15, 1992 |
| Priority date | — |
| Expiry date | Nov 19, 2011 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe arranged to oppose a sample is coupled to a driving portion constituted by an actuator capable of obtaining a large expansion/contraction amount and an actuator capable of obtaining a small expansion/contraction amount. In order to keep the gap length between the sample and the probe constant, a first gap length control system drives the actuator and a second gap length control system having a driving time constant smaller than that of the first gap length control system drives the actuator in response to changes in gap length between the sample and the probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.