Coating apparatus
US5149377A · kind A · utility
43Cited by
3References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 15, 1990 |
| Grant date | Sep 22, 1992 |
| Priority date | — |
| Expiry date | Jun 15, 2010 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/482
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for coating substrates by photolytic dissociation or decomposition of a coating material includes a reactor vessel. A UV radiation source and the substrate to be coated are both disposed in the reactor vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.